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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions - Softcover

Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.

 
9781493303359: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions
Softcover
ISBN 10: 149330335X ISBN 13: 9781493303359
Publisher: William Andrew, 1991

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Synopsis

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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Review

"The text provides and excellent reference for plasma processing." - SAMPE Journal

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Publisher
William Andrew
Publication date
1991
Language
English
ISBN 10 
149330335X
ISBN 13 
9781493303359
Binding
Paperback
Edition number
1
Number of pages
546

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Other Popular Editions of the Same Title

9780815512202: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Featured Edition

ISBN 10:  0815512201 ISBN 13:  9780815512202
Publisher: William Andrew, 1991
Hardcover