An Introduction to Microelectromechanical Systems Engineering, Second Edition - Hardcover

Maluf, Nadim; Williams, Kirt

Hardcover

ISBN 10: 1580535909 ISBN 13: 9781580535908

Publisher: Artech House Publishers, 2004

Synopsis

MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

About this title

About the Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

Edition details

• Publisher: Artech House Publishers
• Publication date: 2004
• Language: English
• ISBN 10: 1580535909
• ISBN 13: 9781580535908
• Binding: Hardcover
• Edition number: 2
• Number of pages: 304