CMOS Gate-Stack Scaling ― Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings) - Hardcover

 
9781605111285: CMOS Gate-Stack Scaling ― Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings)
Hardcover
ISBN 10: 1605111287 ISBN 13: 9781605111285
Publisher: Cambridge University Press, 2009

Synopsis

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

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Publisher
Cambridge University Press
Publication date
2009
Language
English
ISBN 10 
1605111287
ISBN 13 
9781605111285
Binding
Hardcover
Edition number
1
Number of pages
194
Editor
Demkov Alexander A., Taylor Bill, Harris H. Rusty, Butterbaugh Jeffery W., Rachmady Willy

Other Popular Editions of the Same Title

9781107408326: CMOS Gate-Stack Scaling ― Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings)

Featured Edition

ISBN 10:  1107408326 ISBN 13:  9781107408326
Publisher: Cambridge University Press, 2014
Softcover