Introduction to Metrology Applications in IC Manufacturing - Softcover

Bo Su; Eric Solecky; Alok Vaid

 
9781628418118: Introduction to Metrology Applications in IC Manufacturing
Softcover
ISBN 10: 1628418117 ISBN 13: 9781628418118
Publisher: SPIE--The International Society for Optical Engineering, 2015

Synopsis

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis specifically, precision, matching, and relative accuracy.

"synopsis" may belong to another edition of this title.

Publisher
SPIE--The International Society for Optical Engineering
Publication date
2015
Language
English
ISBN 10 
1628418117
ISBN 13 
9781628418118
Binding
Paperback
Edition number
1
Number of pages
184
Editor
James A. Harrington