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Synopsis
This work presents a comprehensive theory describing atomic diffusion in silicon crystals under strong nonequilibrium conditions caused by ion implantation and interaction with the surface or other interfaces. A set of generalized equations that describe diffusion of impurity atoms and point defects are presented in a form suitable for solving numerically. Based on this theory, partial diffusion models are constructed, and the simulation of many doping processes used in microelectronics is carried out.Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals is a useful text for researchers, engineers, and advanced students in semiconductor physics, microelectronics, and nanoelectronics. It helps readers acquire a deep understanding of the physics of diffusion and demonstrates the practical application of the theoretical ideas formulated to find cheaper solutions in the course of manufacturing semiconductor devices and integrated microcircuits.
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
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Hardcover
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COUPLED DIFFUSION OF IMPURITY ATOMS AND POINT DEFECTS IN SILICON CRYSTALS
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
Seller: Basi6 International, Irving, TX, U.S.A.
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Condition: Brand New. New. US edition. Expediting shipping for all USA and Europe orders excluding PO Box. Excellent Customer Service. Seller Inventory # ABEOCT25-209184
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COUPLED DIFFUSION OF IMPURITY ATOMS AND POINT DEFECTS IN SILICON CRYSTALS
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
Seller: Romtrade Corp., STERLING HEIGHTS, MI, U.S.A.
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Condition: New. This is a Brand-new US Edition. This Item may be shipped from US or any other country as we have multiple locations worldwide. Seller Inventory # ABNR-189212
Quantity: 1 available
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
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Coupled Diffusion Of Impurity Atoms And Point Defects In Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
Seller: Romtrade Corp., STERLING HEIGHTS, MI, U.S.A.
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
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Coupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
Published by
World Scientific Publishing Europe Ltd, 2019
ISBN 10: 1786347156
ISBN 13: 9781786347152
New
Hardcover
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Seller rating 5 out of 5 stars
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