Chemistry in Microelectronics

ISBN 13: 9781848214361

Chemistry in Microelectronics

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9781848214361: Chemistry in Microelectronics
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Microelectronics is a complex world where many sciences need tocollaborate to create nano-objects: we need expertise inelectronics, microelectronics, physics, optics and mechanics alsocrossing into chemistry, electrochemistry, as well as biology,biochemistry and medicine. Chemistry is involved in many fieldsfrom materials, chemicals, gases, liquids or salts, the basics ofreactions and equilibrium, to the optimized cleaning of surfacesand selective etching of specific layers. In addition, over recentdecades, the size of the transistors has been drastically reducedwhile the functionality of circuits has increased. This bookconsists of five chapters covering the chemicals and sequences usedin processing, from cleaning to etching, the role and impact oftheir purity, along with the materials used in “Front End Ofthe Line” which corresponds to the heart and performance ofindividual transistors, then moving on to the “Back End Ofthe Line” which is related to the interconnection of all thetransistors. Finally, the need for specific functionalization alsorequires key knowledge on surface treatments and chemicalmanagement to allow new applications.

Contents

1. Chemistry in the “Front End of the Line” (FEOL):Deposits, Gate Stacks, Epitaxy and Contacts, François Martin,Jean-Michel Hartmann, Véronique Carron and Yannick LeTiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-HenriHaumesser, Carole Pernel, Jeffery Butterbaugh, SylvainMaîtrejean and Didier Louis.
3. The Chemistry of Wet Surface Preparation: Cleaning, Etching andDrying, Yannick Le Tiec and Martin Knotter.
4. The Use and Management of Chemical Fluids in Microelectronics,Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, CatherinePeyne and Patrick Valenti.
5. Surface Functionalization for Micro- and Nanosystems:Application to Biosensors, Antoine Hoang, Gilles Marchand,Guillaume Nonglaton, Isabelle Texier-Nogues and FrancoiseVinet.

About the Authors

Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop theadvanced 14 nm CMOS node and the FDSOI technology. He helddifferent technical positions from the advanced 300 mm SOI CMOSpilot line to different assignments within SOITEC for advancedwafer development and later within INES to optimize solar cellramp-up and yield. He has been part of the ITRS Front End technicalworking group at ITRS since 2008.

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Book Description ISTE Ltd and John Wiley Sons Inc, United Kingdom, 2013. Hardback. Condition: New. Language: English . Brand New Book. Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in Front End Of the Line which corresponds to the heart and performance of individual transistors, then moving on to the Back End Of the Line which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the Front End of the Line (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Francois Martin, Jean-Michel Hartmann, Veronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008. Seller Inventory # AAH9781848214361

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Book Description ISTE Ltd and John Wiley Sons Inc, United Kingdom, 2013. Hardback. Condition: New. Language: English . Brand New Book. Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in Front End Of the Line which corresponds to the heart and performance of individual transistors, then moving on to the Back End Of the Line which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the Front End of the Line (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Francois Martin, Jean-Michel Hartmann, Veronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008. Seller Inventory # AAH9781848214361

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Book Description ISTE Ltd and John Wiley Sons Inc, United Kingdom, 2013. Hardback. Condition: New. Language: English . This book usually ship within 10-15 business days and we will endeavor to dispatch orders quicker than this where possible. Brand New Book. Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in Front End Of the Line which corresponds to the heart and performance of individual transistors, then moving on to the Back End Of the Line which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the Front End of the Line (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Francois Martin, Jean-Michel Hartmann, Veronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008. Seller Inventory # BTE9781848214361

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