This book contains the 27 papers presented at the second international conference on the topic, which was held September 17-19, 1997, in Lausanne, Switzerland.
In recent years rapid advances have been made in the technology for the manufacture of microsystems and microstructures. These advances, and the development of microelectromechanical systems, have created a demand for accurate design and simulation of the systems and the behavior of the fabrication and manufacturing processes. As the fabrication of prototypes is very expensive, simulation of the device properties in the design phase is of great importance.
The conference attracted contributions from many different countries covering design, analysis, simulation, optimization, process simulation and microelectronics. All of the papers in the book have been directly reproduced from material submitted by the authors.
These proceedings are divided into sections covering materials modeling, electronics design, microsystems applications, mixed level simulation and CAD tools.
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