An Introduction to MEMS Technology: Design & Analysis of MEMS Based Microheater Array on SOI Wafer for Low Power Gas Sensor Applications - Softcover

Datta Gupta, Avigyan; Roy Chowdhury, Chirashree

Softcover

ISBN 10: 3659247006 ISBN 13: 9783659247002

Publisher: LAP LAMBERT Academic Publishing, 2012

Synopsis

Microelectromechanical systems(MEMS)are small integrated devices or systems that combine electrical and mechanical components. They range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system. MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.These systems can sense, control, and activate mechanical processes on the micro scale, and function individually or in arrays to generate effects on the macro scale.In this book a detailed description of the design and analysis of MEMS based microheater array on SOI wafer for gas sensor application is proposed.MEMS based array of microheaters of SOI wafer have an added advantage which increases the efficiency of the microheater i.e less power is required to reach high temperature and also the thermal loss is minimized.They are usually produced using a standard CMOS process, have the additional advantages of being readily realized by commercial foundries and amenable to the inculsion of on-chip electronics.

About this title

About the Author

Avigyan Datta Gupta was born in Kolkata, WestBengal, India on 16thAugust, 1986.He received the B.Tech degree in Electronics & Instrumentation Engineering in 2011.He is involved in several projects & workshops in Jadavpur University,IIT Kharagpur and Bengal Engineering & Science University.His area of interest in Analog/Mixed Signal VLSI and MEMS.

Edition details

• Publisher: LAP LAMBERT Academic Publishing
• Publication date: 2012
• Language: English
• ISBN 10: 3659247006
• ISBN 13: 9783659247002
• Binding: Paperback
• Number of pages: 100