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Integral'nye mikromekhanicheskie zerkala (Russian Edition) - Softcover

Lysenko, Igor' Evgen'evich

 
9783659407420: Integral'nye mikromekhanicheskie zerkala (Russian Edition)
Softcover
ISBN 10: 3659407429 ISBN 13: 9783659407420
Publisher: LAP LAMBERT Academic Publishing, 2013

Synopsis

Rassmotreny printsipy postroeniya mikromekhanicheskikh zerkal i ustroystv obrabotki signalov emkostnykh preobrazovateley peremeshcheniy. Predstavleny razrabotannye metody postroeniya mikromekhanicheskikh zerkal s krestoobraznym i integrirovannym vnutrennimi podvesami, uravneniya dvizheniya zerkal'nykh elementov i modeli dlya rascheta zhestkostey uprugikh podvesov predlozhennykh ustroystv. Predlozhen metod proektirovaniya mikromekhanicheskikh zerkal.

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About the Author

Lysenko Igor' Evgen'evich – kandidat tekhnicheskikh nauk, dotsent kafedry konstruirovaniya elektronnykh sredstv fakul'teta elektroniki i priborostroeniya Yuzhnogo federal'nogo universiteta. Oblast' nauchnykh interesov: razrabotka i issledovanie elementnoy bazy, metodov i sredstv proektirovaniya mikro- i nanosistem.

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