Items related to Fabrication of Poly-SiNW Devices for TE Characterization
Synopsis
Thermal conductivity measurement has always been a challenging and difficult task for thermoelectric characterization of semiconductor nanowire. A process flow for poly-Si nanowire device fabrication has been reported in this thesis. The device includes the nanowires as a part of its fabrication which avoids complicated placement of nanowire on the device for experiment and also avoids the contact resistance on the both sides of nanowire. The process flow is repeatable, reliable, and able to produce functional devices. Specifically, processes were found in this research to optimize the stress of Si nitride thin films and isotropic etching of Si substrate by using particular gas mixtures. By this device, thermal conductivity of nanowires of any materials compatible to micro/nano- fabrication, can be measured rather than poly-Si nanowires only.
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About the Author
Nahida Akhter got her MS degree from Oklahoma State University in May'2013. Her field of interest was device fabrication and characterization. Currently she is working at Intel Corporation.
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- PublisherLAP LAMBERT Academic Publishing
- Publication date2014
- ISBN 10 3659480711
- ISBN 13 9783659480713
- BindingPaperback
- LanguageEnglish
- Number of pages64
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Fabrication of Poly-SiNW Devices for TE Characterization
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LAP LAMBERT Academic Publishing Aug 2014, 2014
ISBN 10: 3659480711
ISBN 13: 9783659480713
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Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
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Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Thermal conductivity measurement has always been a challenging and difficult task for thermoelectric characterization of semiconductor nanowire. A process flow for poly-Si nanowire device fabrication has been reported in this thesis. The device includes the nanowires as a part of its fabrication which avoids complicated placement of nanowire on the device for experiment and also avoids the contact resistance on the both sides of nanowire. The process flow is repeatable, reliable, and able to produce functional devices. Specifically, processes were found in this research to optimize the stress of Si nitride thin films and isotropic etching of Si substrate by using particular gas mixtures. By this device, thermal conductivity of nanowires of any materials compatible to micro/nano- fabrication, can be measured rather than poly-Si nanowires only. 64 pp. Englisch. Seller Inventory # 9783659480713
Quantity: 2 available
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Fabrication of Poly-SiNW Devices for TE Characterization
Published by
LAP LAMBERT Academic Publishing, 2014
ISBN 10: 3659480711
ISBN 13: 9783659480713
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Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
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Taschenbuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Thermal conductivity measurement has always been a challenging and difficult task for thermoelectric characterization of semiconductor nanowire. A process flow for poly-Si nanowire device fabrication has been reported in this thesis. The device includes the nanowires as a part of its fabrication which avoids complicated placement of nanowire on the device for experiment and also avoids the contact resistance on the both sides of nanowire. The process flow is repeatable, reliable, and able to produce functional devices. Specifically, processes were found in this research to optimize the stress of Si nitride thin films and isotropic etching of Si substrate by using particular gas mixtures. By this device, thermal conductivity of nanowires of any materials compatible to micro/nano- fabrication, can be measured rather than poly-Si nanowires only. Seller Inventory # 9783659480713
Quantity: 1 available
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Fabrication of Poly-SiNW Devices for TE Characterization
Published by
LAP LAMBERT Academic Publishing, 2014
ISBN 10: 3659480711
ISBN 13: 9783659480713
New
Softcover
Seller: moluna, Greven, Germany
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Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Autor/Autorin: Akhter NahidaNahida Akhter got her MS degree from Oklahoma State University in May 2013. Her field of interest was device fabrication and characterization. Currently she is working at Intel Corporation.Thermal conductivity measur. Seller Inventory # 5158738
Quantity: Over 20 available