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Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell's equations using the volume integral method (VIM) - Softcover
Synopsis
Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method.
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About the Author
He is a lecturer at Haramaya University. He received his B.Sc. degree in Mathematics with distinction from Dilla University. He studied his 1st M.Sc. degree in Mathematics at Norwegian University of Science and Technology (Norway) and his 2nd M.Sc. degree in Industrial and Applied Mathematics at Eindhoven University of Technology (The Netherlands).
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- PublisherLAP LAMBERT Academic Publishing
- Publication date2011
- ISBN 10 3846510122
- ISBN 13 9783846510124
- BindingPaperback
- LanguageEnglish
- Number of pages104
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
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LAP LAMBERT Academic Publishing Okt 2011, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. 104 pp. Englisch. Seller Inventory # 9783846510124
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Preconditioning Dense Complex Linear Systems from a VIM Discretization : Discretizing Maxwell's equations using the volume integral method (VIM)
Published by
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. Seller Inventory # 9783846510124
Quantity: 1 available
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Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell*s equations using the volume integral method (VIM)
Published by
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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