Items related to Aluminium Nitride based MEMS Acoustic Sensor: Design...
- PublisherLAP LAMBERT Academic Publishing
- Publication date2018
- ISBN 10 6139817587
- ISBN 13 9786139817580
- BindingPaperback
- LanguageEnglish
- Number of pages124
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Aluminium Nitride based MEMS Acoustic Sensor
Published by
LAP LAMBERT Academic Publishing Apr 2018, 2018
ISBN 10: 6139817587
ISBN 13: 9786139817580
New
Taschenbuch
Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Aluminium Nitride based Sensor details the design, simulation and fabrication of AlN based MEMS acoustic sensor for high sound pressure level measurement that is beneficial to researchers as well as to students seeking to better understand the sensor fabrication and become more efficient and productive in sensor technology. This book details the comparison between different piezoelectric materials properties. It covers the major features of the semiconductor fabrication steps with both practical and theoretical aspects, which should appeal to readers with variety of interests and needs. The author, shares valuable knowledge and experience on acoustic sensor design, simulation and fabrication. Specific topics covered include design and mathematical modelling, mask layout, bulk micromachining and diaphragm optimization, mask design, development and optimization of AlN layer. 124 pp. Englisch. Seller Inventory # 9786139817580
Quantity: 2 available
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Aluminium Nitride based MEMS Acoustic Sensor : Design Simulation and Fabrication
Published by
LAP LAMBERT Academic Publishing, 2018
ISBN 10: 6139817587
ISBN 13: 9786139817580
New
Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Aluminium Nitride based Sensor details the design, simulation and fabrication of AlN based MEMS acoustic sensor for high sound pressure level measurement that is beneficial to researchers as well as to students seeking to better understand the sensor fabrication and become more efficient and productive in sensor technology. This book details the comparison between different piezoelectric materials properties. It covers the major features of the semiconductor fabrication steps with both practical and theoretical aspects, which should appeal to readers with variety of interests and needs. The author, shares valuable knowledge and experience on acoustic sensor design, simulation and fabrication. Specific topics covered include design and mathematical modelling, mask layout, bulk micromachining and diaphragm optimization, mask design, development and optimization of AlN layer. Seller Inventory # 9786139817580
Quantity: 1 available
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Aluminium Nitride based MEMS Acoustic Sensor
Published by
LAP LAMBERT Academic Publishing, 2018
ISBN 10: 6139817587
ISBN 13: 9786139817580
New
Softcover
Seller: moluna, Greven, Germany
Seller rating 5 out of 5 stars
Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Autor/Autorin: Mishra Vipul VaibhavVipul Vaibhav Mishra, M.Tech: Studied Electronics Design and Technology at Tezpur University. He has research experience in MEMS & Micro Sensor group at CSIR-CEERI, Pilani also he worked as Asst. Professor at MNIT. Seller Inventory # 507125109
Quantity: Over 20 available