Synopsis
Table of Contents Introduction to VLSI Technology Film Deposition Epitaxy Process Diffusion Process Ion Implantation Lithography Photoresist and Etching MOSFET and MOS Fabrication Technology Simulation Process (IC Fabrication Steps) Bipolar IC Technology Appendices Examination Paper Index
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Vlsi (Technology, Design & Basic Of Micro Elec.
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S. K. Kataria & Sons (Publishers), 2010
ISBN 10: 8188458171
ISBN 13: 9788188458172
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