Advances in Multiphysics Simulation and Experimental Testing of MEMS

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.

This book would be of interest to those in academic or industrial research that model MEMS devices. The book will provide some of the latest methods used to model these devices along with some experimental methods used to characterize MEMS. -- IEEE Electrical Insulation Magazine "IEEE Electrical Insulation Magazine"