Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling

Language: English

Published by Cuvillier, Cuvillier Nov 2014, 2014

3954048671 / 9783954048670

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This item is printed on demand - Print on Demand Titel. Neuware -Ultrashort laser pulses are capable of generating micro structures with high precision and challenging quality for electronics, optics, medical and automotive applications. However, the realization of microstructures with high aspect-ratio, especially microdrillings, is still a demanding task. Deep drillings show the formation of bulges, a bending of the hole and multiple capillaries. A direct investigation of the drilling process in opaque materials, especially metals, is not feasible and different explanations for the hole shape formation have been developed. The specific contribution of the possible influences on the shape formation are not fully understood yet.In this work, an in-situ observation of drilling in an opaque material is realized for the first time. Silicon is used as a model system for laser drilling in semiconductors and metals. The influence of the processing parameters on the hole shape evolution is studied in detail, in particular for the pulse energy, pulse duration, repetition rate as well as ambient pressure. The reasons for the special drilling behavior are examined with focus on the particle deposition, the plasma interaction and the light propagation inside the hole capillary.Cuvillier Verlag, Nonnenstieg 8, 37075 Göttingen 154 pp. Englisch.

Seller Inventory # 9783954048670

Title
Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling
Author
Sven Döring
Publisher
Cuvillier, Cuvillier Nov 2014
Publication year
2014
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
3954048671
ISBN 13
9783954048670
Item weight
209 grams
Dimensions
210x148x9 mm

buchversandmimpf2000

Emtmannsberg, BAYE, Germany

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Impressum Thorsten Retsch Buchversand Mimpf2000 Oberölschnitz 16 95517 Emtmannsberg Deutschland Telefon: 09209-2023188 Email: mimpf2000@online.de USt-ID-Nr.: DE 235096871 Wir führen gebrauchte Bücher aus allen Sparten der Literatur

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