CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY (HB 1998). This item is unavailable.
Language: English
Published by SPRINGER, 1998
- Hardcover
- New
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International Edition
Unavailable
Hardcover
Condition: New
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Seller Inventory # CBS 9781563967535
- Title
- CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY (HB 1998)
- Author
- SEILER D. G.
- Publisher
- SPRINGER
- Publication year
- 1998
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 1563967537
- ISBN 13
- 9781563967535
- Edition
- International Edition
The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.
"Synopsis" may belong to another edition of this title.