Characterization and Metrology for ULSI Technology: 2003: 2003 International Conference on Characterization and Metrology for ULSI Technology (AIP Conference Proceedings, 683)
Language: English
Published by American Institute of Physics, 2003
- Hardcover
- Used
Seller: Phatpocket Limited, Waltham Abbey, HERTS, United KingdomPhatpocket Limited
AbeBooks seller since April 28, 2005
Condition: Used - Good
US$ 190.77
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Your purchase helps support Sri Lankan Children's Charity 'The Rainbow Centre'. Ex-library, so some stamps and wear, but in good overall condition. Our donations to The Rainbow Centre have helped provide an education and a safe haven to hundreds of children who live in appalling conditions.
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- Title
- Characterization and Metrology for ULSI Technology: 2003: 2003 International Conference on Characterization and Metrology for ULSI Technology (AIP Conference Proceedings, 683)
- Author
- Alain C. Diebold Thomas J. Shaffner David G. Seiler
- Publisher
- American Institute of Physics
- Publication year
- 2003
- Condition
- Good
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0735401527
- ISBN 13
- 9780735401525
The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Topics include: integrated circuit history, challenges and overviews, front end, lithography, interconnect and back end, and critical analytical techniques.
Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continue the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics.
The editors believe that this book of collected papers provides a concise and effective portrayal of industry characterization needs and the way they are being addressed by industry, academia, and government to continue the dramatic progress in semiconductor technology. Hopefully, it will also provide a basis for stimulating advances in metrology and new ideas for research and development.
"Synopsis" may belong to another edition of this title.
Phatpocket Limited
Waltham Abbey, HERTS, United Kingdom
AbeBooks seller since April 28, 2005
Shipping rates from United Kingdom to U.S.A.
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Phatpocket Limited is a world class secondhand bookstore located in the Hertfordshire countryside in the United Kingdom. We specialize in textbooks across an enormous variety of subjects. We aim to provide a low cost source of high quality textbooks to the academic community. We also have a sizable collection of rare and collectible books. We are dedicated to providing our customers with the highest standard of customer service in the bookselling business.Phatpocket Limited is registered in England and Wales: No. 04924751.…
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