Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings, 788)

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed.

Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

David G. Seiler
David G. Seiler, Ph.D., is chief of the Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, at the National Institute of Standards and Technology in Gaithersburg, Maryland. He lives in Maryland and was recently selected to receive a Purdue School of Science Distinguished Alumni Award.
Laurel S. Brunvoll
Laurel Seiler Brunvoll is owner of Writing Solutions, a writing and public relations firm based in Maryland. She has had more than 650 articles published in both national and local magazines and newspapers. She lives in Maryland with her husband Steven and two sons.