Charged Particle Optics Theory

Charged Particle Optics Theory: An Introduction identifies the most important concepts of charged particle optics theory, and derives each mathematically from the first principles of physics. Assuming an advanced undergraduate-level understanding of calculus, this book follows a logical progression, with each concept building upon the preceding one. Beginning with a non-mathematical survey of the optical nature of a charged particle beam, the text:

• Discusses both geometrical and wave optics, as well as the correspondence between them



• Describes the two-body scattering problem, which is essential to the interaction of a fast charged particle with matter



• Introduces electron emission as a practical consequence of quantum mechanics



• Addresses the Fourier transform and the linear second-order differential equation



• Includes problems to amplify and fill in the theoretical details, with solutions presented separately

Charged Particle Optics Theory: An Introduction makes an ideal textbook as well as a convenient reference on the theoretical origins of the optics of charged particle beams. It is intended to prepare the reader to understand the large body of published research in this mature field, with the end result translated immediately to practical application.

Timothy R. Groves is empire innovation professor of nanoscale science (2007 – 2014) at the College of Nanoscale Science and Engineering, SUNY Institute of Technology, State University of New York. Prior to this, he worked in industrial research and development at Vistec Lithography (2005 – 2007), Leica Microsystems (2000 – 2005), IBM’s Semiconductor Research and Development Center (1983 – 2000), Hewlett Packard Labs (1978 – 1983), and Zenith Corporation (1976 – 1978). He also served as consulting professor of electrical engineering at Stanford University (1998 – 2007). He holds a BS in physics from Stanford University, and an MS and Ph.D in physics from the University of Chicago.