Chemical Vapor Deposition Microelectronics Principles Technology Applications
Sherman, Arthur
ISBN 10: 0815511361 ISBN 13: 9780815511366
Published by Noyes Publications, 1987
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hardcover
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Big Star Books, Santa Fe, NM, U.S.A.
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Hardcover, no jacket. In protective plastic wrap. Clean, unmarked, tightly bound. Moderate exterior wear. (Materials Science and Process Technology Series) Photos available. We ship daily. Expedited shipping available! (Heavy books & sets may require extra shipping charges.). Seller Inventory # FM4151
Synopsis:
Presents an extensive, comprehensive study of chemical vapor deposition (CVD). Understanding CVD requires knowledge of fluid mechanics, plasma physics, chemical thermodynamics, and kinetics as well as homogenous and heterogeneous chemical reactions. This text presents these aspects of CVD in an integrated fashion, and also reviews films for use in integrated circuit technology.
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Bibliographic Details
Title: Chemical Vapor Deposition Microelectronics ...
Publisher: Noyes Publications
Publication Date: 1987
Binding: hardcover
Condition: Good
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Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications
Published by
Noyes Pubns, (1987)., Parkdridge, New Jersey, U.S.A., 1987
ISBN 10: 0815511361
ISBN 13: 9780815511366
Used
Hardcover
Seller: Pride and Prejudice-Books, Ballston Lake, NY, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Near Fine. Second Printing. Original blue cloth. Previous owner's name in ink, Near Fine. No Dust Jacket. Seller Inventory # 018428
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Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications (Materials Science and Process Technology Series)
Seller: HPB-Diamond, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Very Good. Connecting readers with great books since 1972! Used books may not include companion materials, and may have some shelf wear or limited writing. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_427461204