Comprehensive Microsystems, 3 Vol. Set (Hb)

Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. At over 2000 pages, Comprehensive Microsystems represents the authoritative primary reference source on microsystems. It addresses the need for an overview of the technologies and capabilities available in this highly interdisciplinary and dynamically-growing engineering field.

Comprehensive Microsystems, provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications. Every article in the work has been commissioned by a panel of internationally recognized editors and written by an acknowledged expert in any one of a variety of disciplines. The articles provide a concise overview of a particular aspect of the microsystems field and are accompanied by extensive bibliographies, cross-referencing and indexes, enhancing the value of the text. by guiding the user to the most relevant further reading within the ever-expanding available literature. Much care has been given to avoid overlap and to provide consistency in style and contents.

• The first and foremost comprehensive reference on Microelectromechanical Systems (MEMS)
• Unifies established research from recognized sources in an easily accessible format
• Provides an essential reference source for both academics and professionals in the field

Yogesh B. Gianchandani is a Professor at the University of Michigan, Ann Arbor, with a primary appointment in the Electrical Engineering and Computer Science Department and a courtesy appointment in the Mechanical Engineering Department. Since 2010 Dr. Gianchandani has served as the Director for the Center for Wireless Integrated MicroSensing and Systems (umwims2.org) at the University of Michigan. Dr. Gianchandani’s research interests include microsystems for environmental monitoring and healthcare (web.eecs.umich.edu/~yogesh/). He has graduated 48 doctoral students and contributed to more than 50 issued or pending US patents and about 350 papers in journals and conferences. From 2007 to 2009 he served at the U.S. National Science Foundation as the Program Director for Micro and Nano Systems within the Electrical, Communication, and Cyber Systems Divi?sion (ECCS). In 2024 he re-joined ECCS as an Expert consultant. Dr. Gianchandani is an IEEE Fellow. He is also a co-founder of, and advisor to Omniscent, Inc., Earth Wind Micro, Inc. and Exosome Plus