Copper Electroplating and Micro-Textured ITO for Vertical GaN LEDs: Using Copper Electroplating Technique and Micro-Textured Indium Tin Oxide in Investigation and Fabrication of Vertical GaN LEDs

At 20mA injection current, compared with the flat ITO LEDs, the improvements of the convex micro- textured ITO ones in lumen, mcd and light output power (mW) are 9.8%, 13.8% and 16.3%, respectively. By controlling the wet etching time of two different ITO patterns carefully, so we could not degrade the forward voltage (VF) of micro-textured ITO LEDs. At 350mA injection current, compared with the flat surface LEDs, the improvement of the convex micro- textured ITO and n-GaN roughening ones in mcd, lm and mW are 22.5%, 36.5% and 50% respectively, because of the higher light extraction efficiency.

The authors would like to appreciate the financial support from the Bureau of Energy, Ministry of Economic Affairs of R.O.C., for supporting this research under Contract No. 99-D0204-6 and the LED Lighting and Research Center, NCKU for assistance in devices analysis.