Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July 1-13, 1991 Editor(s): Coffa, S.; Priolo, Francesco; Rimini, Emanuele; Poate, J. M. (A&T Bell Laboratories, Murray Hill, New Jersey, USA). Series: NATO Science Series E:. Num Pages: 557 pages, biography. BIC Classification: TJFC; TJFD5. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 235 x 155 x 31. Weight in Grams: 962. . 1992. Hardback. . . . .

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Bibliographic Details

Title: Crucial Issues in Semiconductor Materials and Processing Technology
Publisher: Kluwer Academic Publishers
Publication Date: 1992
Language: English
ISBN 10: 0792320034
ISBN 13: 9780792320036
Binding: Hardcover
Condition: New

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Synopsis

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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