Defect and Impurity Engineered Semiconductors and Devices

I. Akasaki

ISBN 10: 1558992812 / ISBN 13: 9781558992818

Published by Cambridge University Press, 1995

About this Item

Druck auf Anfrage Neuware - Printed after ordering - Defect engineering has come of age. That theme is well documented by both the academic and industrial research communities in this book from MRS. Going beyond defect control, the book explores the engineering of desired properties in semiconductor materials and devices through the deliberate introduction and manipulation of defects and impurities. Papers are grouped around ten distinct topics covering materials, processing and devices. Topics include: grown-in defects in bulk crystals; grown-in defects in thin films; gettering and related phenomena; hydrogen interaction with semiconductors; defect issues in widegap semiconductors; defect characterization; ion implantation and process-induced defects; defects in devices; interfaces, quantum wells and superlattices; and defect properties, reaction, activation and passivation.

Seller Inventory # 9781558992818

Bibliographic Details

• Title: Defect and Impurity Engineered Semiconductors and Devices
• Publisher: Cambridge University Press
• Publication Date: 1995
• Language: English
• ISBN 10: 1558992812
• ISBN 13: 9781558992818
• Binding: Buch
• Condition: Neu
• Dimensions: 235W x 157H x 62D millimeters 235 millimeters width by 157 millimeters height by 62 millimeters depth
• Weight: 1682 grams

About this title

Synopsis

Defect engineering has come of age. That theme is well documented by both the academic and industrial research communities in this book from MRS. Going beyond defect control, the book explores the engineering of desired properties in semiconductor materials and devices through the deliberate introduction and manipulation of defects and impurities. Papers are grouped around ten distinct topics covering materials, processing and devices. Topics include: grown-in defects in bulk crystals; grown-in defects in thin films; gettering and related phenomena; hydrogen interaction with semiconductors; defect issues in widegap semiconductors; defect characterization; ion implantation and process-induced defects; defects in devices; interfaces, quantum wells and superlattices; and defect properties, reaction, activation and passivation.

Book Description

Defect engineering has come of age. That theme is well documented by both the academic and industrial research communities in this book from MRS. Going beyond defect control, the book explores the engineering of desired properties in semiconductor materials and devices through the deliberate introduction and manipulation of defects and impurities.