Defect Recognition and Image Processing in Semiconductors 1997 : Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997

Language: English

Published by CRC Press, 1998

0750305002 / 9780750305006

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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nach der Bestellung gedruckt Neuware - Printed after ordering - Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.…

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Title
Defect Recognition and Image Processing in Semiconductors 1997 : Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997
Author
J. Doneker
Publisher
CRC Press
Publication year
1998
Condition
Neu
Binding
Buch
Language
English
ISBN 10
0750305002
ISBN 13
9780750305006
Item weight
980 grams
Dimensions
240x161x34 mm

AHA-BUCH GmbH

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