Defects in Silicon: Proceedings of Symposium B on Science and Technology of Defects in Silicon of the 1989 E-Mrs Conference, Strasbourg, Fra

C. A. J. Ammerlaan, A. Chantre et P. Wagner

ISBN 10: 0444886192 / ISBN 13: 9780444886194

Published by Elsevier Science Ltd, 1990

About this Item

Ancien livre de bibliothèque. Légères traces d'usure sur la couverture. Edition 1990. Ammareal reverse jusqu'à 15% du prix net de cet article à des organisations caritatives. ENGLISH DESCRIPTION Book Condition: Used, Very good. Former library book. Slight signs of wear on the cover. Edition 1990. Ammareal gives back up to 15% of this item's net price to charity organizations.

Seller Inventory # D-625-148

Bibliographic Details

• Title: Defects in Silicon: Proceedings of Symposium B on Science and Technology of Defects in Silicon of the 1989 E-Mrs Conference, Strasbourg, Fra
• Publisher: Elsevier Science Ltd
• Publication Date: 1990
• Language: English
• ISBN 10: 0444886192
• ISBN 13: 9780444886194
• Binding: Hardcover
• Condition: Très bon

About this title

Synopsis

This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities. In view of its key position within the conference scope, several papers examine process induced defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.