Design, Analysis and Synthesis of Co Gas Sensor Using Mems Technology

This Book reports design, analysis and synthesis of silicon based carbon monoxide gas sensor using MEMS technology. The emphasis is on investigating the temperature of micro-hotplate to the variation in the power as the analyte is sensitive to specific gas at high temperature. The general approach pursued in this work is to explore the possibility of using micro-hotplate for sensing the gas. For the completion of the sensor design, analysis is the vital part as it shows the temperature distribution in the micro-hotplate. In realizing the aim of the book a silicon based carbon monoxide gas sensor for chemical sensing is designed and simulated. The sensing film used for the detection of carbon monoxide gas is tin oxide film. It is extensively used in gas sensor applications as it is sensitive to specific gas at high temperatures. In order to achieve such high operating temperature, a microstructure called the micro-hotplate was developed.