Druck auf Anfrage Neuware - Printed after ordering - This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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Bibliographic Details

Title: Design and Manufacturing of Active Microsystems
Publisher: Springer Berlin Heidelberg, Springer Berlin Heidelberg
Publication Date: 2011
Language: English
ISBN 10: 3642129021
ISBN 13: 9783642129025
Binding: Buch
Condition: Neu
Dimensions: 241 millimeters width by 160 millimeters height by 29 millimeters depth
Weight: 846 grams

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Synopsis

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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