The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): Pawlak, B. J.; Pelaz, M. L.; Law, M.; Surugo, K. Series: MRS Proceedings. Num Pages: 319 pages, Illustrations. BIC Classification: TGM. Category: (U) Tertiary Education (US: College). Dimension: 228 x 152 x 23. Weight in Grams: 568. . 2008. Hardback. . . . .

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Bibliographic Details

Title: Doping Engineering for Front-end Processing: Volume 1070
Publisher: Materials Research Society
Publication Date: 2008
Language: English
ISBN 10: 160511040X
ISBN 13: 9781605110400
Binding: Hardcover
Condition: New

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Synopsis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

Book Description

The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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