Electromigration is a microscopic phenomenon involving electric field-induced diffusion, which is very relevant to damage in interconnections. A common method for monitoring interconnection degradation is through electrical resistance measurements, which requires direct electrical contact. It is desirable to develop non-contact methods to monitor electromigration damage formation. In this thesis, we propose a novel Optical Microscopy Imaging Method (OMIM), and we provide a theoretical description and experimental results. OMIM not only provides a new method for studying electromigration, but also provides a useful method for studying other micro-devices and materials in a non- contact mode.

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Linghong Li is an assistant professor of physics at the University of Tennessee at Martin. She has written over 20 research articles and coauthored two books that help educate people in physics.

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