An Electrostatically Actuated Membrane Microvalve: With a View to its Design, Simulation, Fabrication, and Characterization

Çubukçu, Ali Sükrü

ISBN 10: 3847330098 / ISBN 13: 9783847330097

Published by LAP LAMBERT Academic Publishing, 2012

About this Item

LIKE NEW. SHIPS FROM MULTIPLE LOCATIONS.

Seller Inventory # ERICA75838473300986

Bibliographic Details

• Title: An Electrostatically Actuated Membrane Microvalve: With a View to its Design, Simulation, Fabrication, and Characterization
• Publisher: LAP LAMBERT Academic Publishing
• Publication Date: 2012
• Language: English
• ISBN 10: 3847330098
• ISBN 13: 9783847330097
• Binding: Paperback
• Condition: Like New
• Book Type: book

About this title

Synopsis

This book presents an electrostatically actuated, normally open, low pressure-drop silicon membrane microvalve. It is intended to be used in an ion mobility spectrometer in order to enhance its operating range. The fabricated microvalve shows expected characteristics except hysteresis behavior and its quality of repeatability, which are discussed in the book reasoning them by parasitic charges in the silicon dioxide and built-in oxide voltage. Pull-in and relaxation characteristics of the diaphragm are also discussed extensively. Nitrogen flow rate is 30.05 sccm at 50 mbar pressure drop. Experiments show 0.0139 sccm leakage rate for an initial flow of 5 sccm which corresponds to a characteristic ratio of 359.7 using 200 V. This can be improved to 1798.6 using 300 V. This work is also an example to microsystem and microvalve design, guiding the reader from design to characterization following each step, and providing details such as governing equations, simulation codes in ANSYS, lithography masks, and fabrication steps. Thus, it will hopefully be beneficial for beginners in MEMS with its simple language as well as for intermediate level designers seeking detailed information.

About the Author

Ali S. Cubukcu received the BSc degree in electrical and electronics engineering from METU and the MSc degree in microelectronics and microsystems engineering from TUHH in 2003 and 2006, respectively. He is currently a PhD student within IMTEK at University of Freiburg. His research interests include microvalves and thermal flow sensors.