Excimer Laser Technology

Gerd Marowsky

ISBN 10: 3642057497 / ISBN 13: 9783642057496

Published by Springer Berlin Heidelberg, Springer Berlin Heidelberg Okt 2010, 2010

About this Item

Neuware -A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 456 pp. Englisch.

Seller Inventory # 9783642057496

Bibliographic Details

• Title: Excimer Laser Technology
• Publisher: Springer Berlin Heidelberg, Springer Berlin Heidelberg Okt 2010
• Publication Date: 2010
• Language: English
• ISBN 10: 3642057497
• ISBN 13: 9783642057496
• Binding: Taschenbuch
• Condition: Neu
• Dimensions: 235W x 155H x 25D millimeters 235 millimeters width by 155 millimeters height by 25 millimeters depth
• Weight: 686 grams

About this title

Synopsis

A timely and comprehensive survey, Excimer Laser Technology reports on the current status and range of the underlying technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F₂ laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. Because it offers an effective and understandable introduction to the current and future status of the field, Excimer Laser Technology is valuable reading for laser technology students, process application researchers, engineers or anyone interested in this increasingly important area.

From the Back Cover

 This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F_{2  ^{laser technology.}} 

_{Additional chapters on optics, devices and laser systems complete this compact handbook.}

_{A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.}