Paperback Pages Number: 613 Language: Chinese. Book systematically describes the microelectronics manufacturing scientific principles and engineering technology. covering all the basic individual involved in integrated circuit manufacturing process. including photolithography. plasma and reactive ion etching. ion implantation. diffusion. oxidation. evaporation. vapor phase epitaxy growth. sputtering and chemical vapor deposition. For each individual process. not only its physical and chemical.

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Bibliographic Details

Title: Foreign electronics and communications materials series: microelectronics manufacturing of scientific principles and engineering (2nd Edition)(Chinese Edition)
ISBN 10: 7505383132
ISBN 13: 9787505383135
Binding: paperback
Condition: New

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NAN JING SHI JIANG NING QU NING YUAN DIAN ZI SHANG WU ZHONG XIN
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