Paperback, in-8, 514 pp. This new text introduces the material of each process type by explaining the underlying chemical engineering (and physical) principles. For microelectronic processing courses the text progresses from an overview of microelectronics processing through a logically-sequenced discussion of the processes leading to integrated circuits. The author is very careful to define terms that may be unfamiliar to chemical engineers, to provide numerous examples to aid in their understanding, and to include ample end-of-chapter problems.

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Bibliographic Details

Title

Fundamentals of Microelectronics Processing

Publisher

Mcgraw-hill, London

Publication Date

1990

Binding

Soft cover

Condition

Good

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SCIENCE

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MERS EXPERT RESEARCH SYSTEM BV
Mevrouw Courtmansstraat, 27, Antwerpen, 2600, Belgium

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