Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two: Manufacturing Techniques for Microfabrication and Nanotechnology

Madou, Marc J.

ISBN 10: 1420055194 / ISBN 13: 9781420055191

Published by CRC Press, 2011

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Bibliographic Details

• Title: Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two: Manufacturing Techniques for Microfabrication and Nanotechnology
• Publisher: CRC Press
• Publication Date: 2011
• Language: English
• ISBN 10: 1420055194
• ISBN 13: 9781420055191
• Binding: Hardcover
• Condition: new

About this title

Synopsis

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

About the Author

Marc J. Madou