Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

Madou, Marc J.

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ISBN 10: 0849308267 ISBN 13: 9780849308260
Published by CRC Press, 2002
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Synopsis:

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter
  • About the Author: University of California, Irvine, USA

    "About this title" may belong to another edition of this title.

    Bibliographic Details

    Title: Fundamentals of Microfabrication: The ...
    Publisher: CRC Press
    Publication Date: 2002
    Binding: Hardcover
    Condition: Good
    Edition: 2nd Edition

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    Condition: Good+. Hardcover, 752 pages. Good+ condition. Second edition. Size 11.25"x8.75". "Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem." Book has moderate handling/shelfwear. Rear board is scuffed on lower front corner. Binding is tight. Text is clean and unmarked. Seller Inventory # 009606

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