Fundamentals of Semiconductor Processing Technology

Lou N. Hutter

ISBN 10: 0792395344 / ISBN 13: 9780792395348

Published by Springer US, Springer New York Dez 1994, 1994

About this Item

Neuware -The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a 'bridge' between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 620 pp. Englisch.

Seller Inventory # 9780792395348

Bibliographic Details

• Title: Fundamentals of Semiconductor Processing Technology
• Publisher: Springer US, Springer New York Dez 1994
• Publication Date: 1994
• Language: English
• ISBN 10: 0792395344
• ISBN 13: 9780792395348
• Binding: Buch
• Condition: Neu
• Dimensions: 241W x 160H x 38D millimeters 241 millimeters width by 160 millimeters height by 38 millimeters depth
• Weight: 1086 grams

About this title

Synopsis

The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac­ turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil­ ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech­ nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi­ conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir­ cuits, their electrical parameters, reliability, and yield.