Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology

Tolliver, Donald L. (ed)

ISBN 10: 0815511515 / ISBN 13: 9780815511519

Published by Noyes Publications, Park Ridge, NJ, 1988

About this Item

488pp.incl.index; HB blk.w/gilt; fine condition w/clean,tight pgs. DJ white w/red&blk.; fine condition. " .covers the basics in most areas for the beginner, and it delves in depth into the more critical issues of process engineering and circuit manufacturing for the advanced reader." illus.

Seller Inventory # 026086

Bibliographic Details

• Title: Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology
• Publisher: Noyes Publications, Park Ridge, NJ
• Publication Date: 1988
• Language: English
• ISBN 10: 0815511515
• ISBN 13: 9780815511519
• Binding: Hardcover
• Edition: 2nd
• Condition: Fine
• Dust Jacket Condition: Fine
• Seller catalogs:
  • Stan

About this title

Synopsis

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing.

What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.

Review

"ąshould be in the library of all microelectronics engineers and designers." - Microelectronics & Reliability