Title: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks and P. Rai-Choudhury
Publisher: Society of Photo-Optical Instrumentation Engineers
Publication Date: 1997
Language: English
ISBN 10: 0819423785
ISBN 13: 9780819423788
Binding: Hardcover
Condition: New

About this title

Synopsis

Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Contents

- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index

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