Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks
Language: English
Published by Society of Photo-Optical Instrumentation Engineers, 1997
- Hardcover
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- Title
- Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
- Author
- Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks
- Publisher
- Society of Photo-Optical Instrumentation Engineers
- Publication year
- 1997
- Condition
- Fine
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0819423785
- ISBN 13
- 9780819423788
Contents
- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index
"Synopsis" may belong to another edition of this title.
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