Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Harry J. Levinson
ISBN 10: 0819423785 ISBN 13: 9780819423788
Published by Brand: Society of Photo-Optical Instrumentation Engineers, 1997
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About this Item
Description:
Seller Inventory # 82C52_47_0819423785
Synopsis:
Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Contents
- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index
"About this title" may belong to another edition of this title.
Bibliographic Details
Title: Handbook of Microlithography, Micromachining...
Publisher: Brand: Society of Photo-Optical Instrumentation Engineers
Publication Date: 1997
Binding: Hardcover
Condition: new
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Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrum, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers (edition ), 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
Used
Hardcover
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks and P. Rai-Choudhury
Published by
Society of Photo-Optical Instrumentation Engineers, 1997
ISBN 10: 0819423785
ISBN 13: 9780819423788
New
Hardcover
Seller: The Book Spot, Sioux Falls, MN, U.S.A.
Seller rating 5 out of 5 stars
Condition: New. (inventory#Shelf). Seller Inventory # EZ97705
Quantity: 1 available