First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the "likely directions" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.

What's in this Edition:

Detailed discussion of electrochemical equipment for plating copper

Information on tools used for evaporation, chemical vapor deposition, and plasma processes

Emphasis on measurement of mechanical and thermal properties of insulators

Methods for characterizing porous dielectric thin films

Greater focus on integration issues and properties of titanium, cobalt, and nickel silicides

Process schemes based on the increased need for borderless contact gates and source/drain

Expanded discussion on choices for low-dielectric insulators

Concentration on electroplated copper, especially morphology of plated films and their properties

Developments in thin film liners and barriers

Expanded material on copper reliability

About the Author

Geraldine C. Schwartz, Geraldine Cogin Shwartz, Kris V. Srikrishnan

"About this title" may belong to another edition of this title.

Store Description

I mainly carry imported books from South East Asia / South Asia for readers of all Age Groups.

Visit Seller's Storefront

Seller's business information

PLETOS INC
6931 51st Avenue, WOODSIDE, Woodside, NY, 11377, U.S.A.

Sale & Shipping Terms

Terms of Sale

We accept return for those books which are received damaged. Though we take appropriate care in packing to avoid such situation.

Shipping Terms

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	12 to 19 business days	12 to 14 business days
First item	US$ 3.99	US$ 6.99

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.