Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications (Materials Science and Process Technology Series)
Language: English
Published by William Andrew, 1994
- Hardcover
- New

Hardcover
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- Title
- Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications (Materials Science and Process Technology Series)
- Author
- Kern, Werner
- Publisher
- William Andrew
- Publication year
- 1994
- Condition
- new
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0815513313
- ISBN 13
- 9780815513315
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
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