Hermeticity Testing of MEMS and Microelectronic Packages (Integrated Microsystems)

Packaging of microelectronics has been developing since the invention of the transistor in 1947. The authors cover the history and development of packaging, along with a view to understanding initial hermeticity testing requirements and the subsequent limitations of these methods when applied to new package types.

Marc P.Y. Desmulliez is the head of the research institute in sensors, signals, and systems at Heriot-Watt University. He earned his Ph.D. in electrical engineering from Heriot-Watt University. Suzanne Costello is a development scientist at MCS Ltd. She earned her Ph.D. in engineering from Heriot-Watt University.