High-Resolution X-Ray Scattering from Thin Films and Multilayers (Springer Tracts in Modern Physics)

Holy, Vaclav; Pietsch, Ullrich; Baumbach, Tilo

ISBN 10: 354062029X / ISBN 13: 9783540620297

Published by Springer, 1998

About this Item

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Bibliographic Details

• Title: High-Resolution X-Ray Scattering from Thin Films and Multilayers (Springer Tracts in Modern Physics)
• Publisher: Springer
• Publication Date: 1998
• Language: English
• ISBN 10: 354062029X
• ISBN 13: 9783540620297
• Binding: Hardcover
• Condition: good

About this title

Synopsis

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.