Integrated Circuit Chip Manufacturing Technology (Chinese Edition)

Li Ke Wei

ISBN 10: 7040318008 / ISBN 13: 9787040318005

Published by Higher Education Press, 2011

About this Item

Good. Dust Jacket NOT present. CD WILL BE MISSING. . SHIPS FROM MULTIPLE LOCATIONS.

Seller Inventory # ERICA82970403180083

Bibliographic Details

• Title: Integrated Circuit Chip Manufacturing Technology (Chinese Edition)
• Publisher: Higher Education Press
• Publication Date: 2011
• Language: Chinese
• ISBN 10: 7040318008
• ISBN 13: 9787040318005
• Binding: paperback
• Edition: 5th or later Edition
• Condition: Good
• Dust Jacket Condition: Dust Jacket Included
• Book Type: book

About this title

Synopsis

This book which focuses on the integrated circuit chip manufacturing technology mainly consists of 13 chapters, covering the contents of an overview of integrated circuit chip manufacturing process, oxidation technology diffusion technique, lithography, etching, ion implantation, chemical vapor deposition, metallization, surface passivation, electrical isolation technology, integrated circuit manufacturing process, defect control, vacuum and equipment, etc. Appendix I describes silicon material basics and silicon material preparation and Appendix II has a list of Chinese and English commonly used terms of Fab plant.