Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

Language: English

Published by Springer Berlin Heidelberg, 2010

364206115X / 9783642061158

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Title
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
Author
Jianfeng Luo|David A. Dornfeld
Publisher
Springer Berlin Heidelberg
Publication year
2010
Condition
New
Binding
Soft cover
Language
English
ISBN 10
364206115X
ISBN 13
9783642061158
Seller catalogs
Mathematik/Naturwissenschaften/Technik/Medizin

moluna

Greven, Germany

5-star seller

AbeBooks seller since July 9, 2020

Shipping rates from Germany to U.S.A.

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