Integrated circuit manufacturing technology(Chinese Edition)

Paperback. Pub 2016-03-01 172 Chinese Chemical Industry Press integrated circuit manufacturing technology comprehensive and systematic introduction of the integrated circuit manufacturing technology. including an overview of the preparation of integrated circuit manufacturing. polycrystalline semiconductor preparing a single crystal semiconductor. wafer preparation. thin films. metal organic chemical vapor deposition. lithography. etching and doping. Integrated circuit manufacturing technology introduces the basic theoretical foundation of integrated circuit manufacturing. the system introduces the preparation of polycrystalline semiconductor. a single crystal semiconductor wafer. the film details the preparation. photolithography and etching and doping process. As the current continuous development of the optoelectronics industry. the compo...