Interlayer Dielectrics For Semiconductor Technologies
Language: English
Published by Academic Press, 2004
- Hardcover
- New
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- Title
- Interlayer Dielectrics For Semiconductor Technologies
- Publisher
- Academic Press
- Publication year
- 2004
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0125112211
- ISBN 13
- 9780125112215
Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.
* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume
* written by renowned experts in the field
* Provides an up-to-date starting point in this young research field.
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