Introduction to Metrology Applications in Ic Manufacturing
Su, Bo; Solecky, Eric; Vaid, Alok
ISBN 10: 1628418117 ISBN 13: 9781628418118
Published by SPIE--The International Society for Optical Engineering, 2015
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Soft cover
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About this Item
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Unread book in perfect condition. Seller Inventory # 24905881
Synopsis:
Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis specifically, precision, matching, and relative accuracy.
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Bibliographic Details
Title: Introduction to Metrology Applications in Ic...
Publisher: SPIE--The International Society for Optical Engineering
Publication Date: 2015
Binding: Soft cover
Condition: As New
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